collaborators

1 paper

cs.OH2008

High Quality Factor Silicon Cantilever Driven by PZT Actuator for Resonant Based Mass Detection

Jian Lu, T. Ikehara, Yi Zhang +3

A high quality factor (Q-factor) piezoelectric lead zirconat titanate (PZT) actuated single crystal silicon cantilever was proposed in this paper for resonant based ultra-sensitive…