2 papers
cond-mat.mtrl-sci2025
X-ray diffraction characterization of suspended structures for MEMS applications
P. Goudeau, N. Tamura, B. Lavelle +6
Mechanical stress control is becoming one of the major challenges for the future of micro and nanotechnologies. Micro scanning X-ray diffraction is one of the promising techniques…
cs.OH2008
Micro-tensile tests on micromachined metal on polymer specimens: elasticity, plasticity and rupture
C. Seguineau, M. Ignat, C. Malhaire +5
This study is focused on the mechanical characterization of materials used in microelectronic and micro- electromechanical systems (MEMS) devices. In order to determine their mecha…