most citedMode localization and sensitivity in weakly coupled resonators

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cs.OH2008

Noise Analysis and Noise-based Optimization for Resonant MEMS Structures

Mrigank Sharma, Akila Kannan, Edmond Cretu

This paper presents a detailed noise analysis and a noise-based optimization procedure for resonant MEMS structures. A design for high sensitivity of MEMS structures needs to take…