2 papers
cs.OH2008
Micro-tensile tests on micromachined metal on polymer specimens: elasticity, plasticity and rupture
C. Seguineau, M. Ignat, C. Malhaire +5
This study is focused on the mechanical characterization of materials used in microelectronic and micro- electromechanical systems (MEMS) devices. In order to determine their mecha…
cs.OH2008
On the determination of Poisson's ratio of stressed monolayer and bilayer submicron thick films
P. Martins, C. Malhaire, S. Brida +1
In this paper, the bulge test is used to determine the mechanical properties of very thin dielectric membranes. Commonly, this experimental method permits to determine the residual…