13 citations · 20 across the 2 of their papers we have counts for
2 papers
cond-mat.mtrl-sci2014★ 13 cited
Capillary origami of micro-machined micro-objects: Bi-layer conductive hinges
A. Legrain, J. W. Berenschot, N. R. Tas +1
Recently, we demonstrated controllable 3D self-folding by means of capillary forces of silicon-nitride micro-objects made of rigid plates connected to each other by flexible hinges…
cs.OH2008★ 7 cited
Low-Drift Flow Sensor with Zero-Offset Thermopile-Based Power Feedback
M. Dijkstra, T. S. J. Lammerink, Meint De Boer +3
A thermal flow sensor has been realised consisting of freely-suspended silicon-rich silicon-nitride microchannels with an integrated Al/poly-Si++ thermopile in combination with up-…