Adsorption of metal impurities on H-terminated Si surfaces and their influence on the wet chemical etching of Si

Teemu Hynninen, Adam S Foster, Miguel A Gosalvez +2

We use first-principles methods to investigate the adsorption of Cu, Pb, Ag, and Mg onto a H-terminated Si surface. We show that Cu and Pb can adsorb strongly while Ag and Mg are f…