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physics.app-ph2026
Reduction of intrinsic losses in nanomechanical silicon nitride resonators through thermal treatment in ultrahigh vacuum
Nicola Cavalleri, Ariane Giesriegl, Robert G. West +7
Since the discovery of dissipation dilution, silicon nitride (SiN) nanomechanical resonators have set the benchmark for ultracoherent mechanical systems, with geometry and strain e…
physics.app-ph2026
Determination of the intrinsic mechanical quality factor in high-stress silicon nitride resonators
Geena Benga, Vincent Dumont, Wei Wang +6
Recent advances in silicon nitride nanomechanical resonators have pushed mechanical quality factors to ultra-high values by combining stress-induced dissipation dilution with mode-…