3 papers
physics.app-ph2026
Reduction of intrinsic losses in nanomechanical silicon nitride resonators through thermal treatment in ultrahigh vacuum
Nicola Cavalleri, Ariane Giesriegl, Robert G. West +7
Since the discovery of dissipation dilution, silicon nitride (SiN) nanomechanical resonators have set the benchmark for ultracoherent mechanical systems, with geometry and strain e…
cond-mat.mtrl-sci2026
HF Etching and Silanization: Evidence for the Role of Surface Hydroxyl Groups in Silicon Nitride Resonator Loss
Ariane Giesriegl, Nicola Cavalleri, Robert West +4
Silicon nitride nanomechanical resonators are central to sensing, quantum technologies, and fundamental physics experiments due to their exceptional mechanical quality fact…
physics.app-ph2026
Determination of the intrinsic mechanical quality factor in high-stress silicon nitride resonators
Geena Benga, Vincent Dumont, Wei Wang +6
Recent advances in silicon nitride nanomechanical resonators have pushed mechanical quality factors to ultra-high values by combining stress-induced dissipation dilution with mode-…