activity
20082023
most citedQDB: a new database of plasma chemistries and reactions

61 citations · 182 across the 8 of their papers we have counts for

collaborators
Showing 2008 · physics.plasm-phShow all

1 paper · 2 filters

physics.plasm-ph2008★ 30 cited

Modeling of chemical processes in the low pressure capacitive RF discharges in a mixture of Ar/C2H2

D. A. Ariskin, I. V. Schweigert, A. L. Alexandrov +2

We study the properties of a capacitive 13.56 MHz discharge properties with a mixture of Ar/C2H2 taking into account the plasmochemistry and growth of heavy hydrocarbons. A hybrid…