30 citations · 30 across the 1 of their papers we have counts for
2 papers
physics.plasm-ph2008★ 30 cited
Modeling of chemical processes in the low pressure capacitive RF discharges in a mixture of Ar/C2H2
D. A. Ariskin, I. V. Schweigert, A. L. Alexandrov +2
We study the properties of a capacitive 13.56 MHz discharge properties with a mixture of Ar/C2H2 taking into account the plasmochemistry and growth of heavy hydrocarbons. A hybrid…
physics.plasm-ph2004
Two-dimensional PIC-MCC simulations of capacitively coupled radio-frequency discharge in methane
A L Alexandrov, I V Schweigert
Two-dimensional capacitively coupled radio frequency discharge in methane is simulated by PIC-MCC method. The results were obtained in pressure range 50-300 mTorr and voltage range…