88 citations · 450 across the 14 of their papers we have counts for
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physics.plasm-ph2021★ 15 cited
Self-bias voltage formation and charged particle dynamics in multi-frequency capacitively coupled plasmas
R. U. Masheyeva, K. N. Dzhumagulova, M. Myrzaly +2
In this work, we analyze the creation of the discharge asymmetry and the concomitant formation of the DC self-bias voltage in capacitively coupled radio frequency plasmas driven by…
physics.plasm-ph2021★ 26 cited
Energy efficiency of voltage waveform tailoring for the generation of excited species in RF plasma jets operated in He/N mixtures
Ihor Korolov, Zoltán Donkó, Gerrit Hübner +3
Based on Tunable Diode Laser Absorption Spectroscopy (TDLAS) measurements of the spatially averaged and peak helium metastable atom densities in a capacitively coupled micro atmosp…