88 citations · 450 across the 14 of their papers we have counts for
4 papers · 2 filters
A computationally assisted spectroscopic technique to measure secondary electron emission coefficients in radio frequency plasmas
M. Daksha, B. Berger, E. Schuengel +5
A Computationally Assisted Spectroscopic Technique to measure secondary electron emission coefficients (-CAST) in capacitively-coupled radio-frequency plasmas is proposed. This…
Electron heating via the self-excited plasma series resonance in geometrically symmetric multi-frequency capacitive plasmas
E. Schuengel, S. Brandt, Z. Donko +3
The self-excitation of Plasma Series Resonance (PSR) oscillations plays an important role in the electron heating dynamics in Capacitively Coupled Radio Frequency (CCRF) plasmas. I…
Customized ion flux-energy distribution functions in capacitively coupled plasmas by voltage waveform tailoring
E. Schuengel, Z. Donko, P. Hartmann +3
We propose a method to generate a single peak at a distinct energy in the ion flux-energy distribution function (IDF) at the electrode surfaces in capacitively coupled plasmas. The…
The effect of ambipolar electric fields on the electron heating in capacitive RF plasmas
J. Schulze, Z. Donko, A. Derzsi +2
We investigate the electron heating dynamics in electropositive argon and helium capacitively coupled RF discharges driven at 13.56 MHz by Particle in Cell simulations and by an an…