2 papers
physics.plasm-ph2008
Acetylene - Argon Plasmas Measured at a Biased Substrate Electrode for Diamond-Like Carbon Deposition. Part 2: Ion Energy Distributions
A. Baby, C. M. O. Mahony, P. Lemoine +1
Ion energy distributions have been determined at the rf-bias electrode in an inductively-coupled acetylene-argon plasma for various substrate bias voltages and frequencies under co…
physics.plasm-ph2008
Acetylene - Argon Plasmas Measured at a Biased Substrate Electrode for Diamond-Like Carbon Deposition. Part 1: Mass Spectroscopy
A. Baby, C. M. O. Mahony, P. D. Maguire
We report, for the first time, quadrupole mass spectrometry of neutral and positive ionic hydrocarbon species measured at the rf biased substrate electrode of an inductively couple…