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19972023
most citedFocused electron beam induced deposition meets materials science

169 citations · 1.1k across the 38 of their papers we have counts for

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cond-mat.mtrl-sci2013

In-situ growth optimization in focused electron-beam induced deposition

Paul M. Weirich, Marcel Winhold, Christian H. Schwalb +1

We present the application of an evolutionary genetic algorithm for the in-situ optimization of nanostructures prepared by focused electron-beam-induced deposition. It allows us to…