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20072021
most citedAn accurate determination of the Avogadro constant by counting the atoms in a 28Si crystal

220 citations · 742 across the 17 of their papers we have counts for

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physics.app-ph2019★ 12 cited

Extracting Dimensional Parameters of Gratings Produced with Self-Aligned Multiple Patterning Using GISAXS

Mika Pflüger, R. Joseph Kline, Analía Fernández Herrero +3

Background: To ensure consistent and high-quality semiconductor production at future logic nodes, additional metrology tools are needed. For this purpose, grazing-incidence small-a…