3 papers
physics.comp-ph2026
Global-in-time Spectral Duhamel-Picard Method for Post-Exposure Bake Simulation and Physics-Informed Neural Operators for EUV Lithography
Doyun Kim, Mircea Dusa, Werner Gilijns +1
We present a global-in-time spectral Duhamel-Picard method with polynomial expansions for post-exposure bake (PEB) simulation. The coupled acid-quencher reaction-diffusion equation…
physics.optics2026
Physics-Informed Neural Operator for Warm-Starting Background-Decomposed and Preconditioned PSFD: Enabling Scalable 3-D EUV Mask Simulation
Doyun Kim, Werner Gillijns
We present a physics-informed neural operator (PINO) trained with pseudo-spectral frequency-domain (PSFD) equations for electromagnetic (EM) scattering problems in EUV lithography.…
physics.optics2026
Pseudo-spectral frequency-domain method with background field decomposition and Green's function preconditioner for electromagnetic scattering problem in EUV lithography
Seungjin Lee, Werner Gillijns, Doyun Kim
We provide an accelerated computational framework to solve electromagnetic scattering problems in planarly layered media arising from extreme ultraviolet (EUV) lithography. To achi…