50 citations · 201 across the 7 of their papers we have counts for
1 paper · 1 filter
D. A. Grishina, C. A. M. Harteveld, L. A. Woldering +1
Current nanostructure fabrication by etching is usually limited to planar structures as they are defined by a planar mask. The realisation of three-dimensional (3D) nanostructures…