Epitaxial Growth of Ultra-smooth $\delta$-NbN Thin Films on TiN-Buffered Sapphire by Room-Temperature Sputtering

Swagata Bhunia, Aakash Shandilya, Sounak Samanta +7

The $\delta$ phase of Niobium Nitride (NbN) is a promising superconducting material, which is chemically stable and shares lattice compatibility with conventional III-Nitride semiconduc…