625 citations · 734 across the 15 of their papers we have counts for
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Nanomechanical resonators fabricated by atomic layer deposition on suspended 2D materials
Hanqing Liu, Saravana B. Basuvalingam, Saurabh Lodha +4
Atomic layer deposition (ALD), a layer-by-layer controlled method to synthesize ultrathin materials, provides various merits over other techniques such as precise thickness control…
Resist and Transfer Free Patterned CVD Graphene Growth on ALD Molybdenum Carbide Nano Layers
Eldad Grady, Chenhui Li, Oded Raz +2
Multilayer graphene (MLG) films were grown by chemical vapour deposition (CVD) on molybdenum carbide () substrates. We fabricated the catalytic films by plasma e…
Control of Graphene Layer Thickness Grown on Plasma Enhanced Atomic Layer Deposition of Molybdenum Carbide
Eldad Grady, W. M. M. Kessels, Ageeth A. Bol
We show the merits of plasma enhanced atomic layer deposition (PEALD) of catalytic substrate for chemical vapour deposition (CVD) graphene growth. The high quality multilayer graph…
Tailored Molybdenum Carbide Properties and Graphitic Nano Layer Formation by Plasma and Ion Energy Control during Plasma Enhanced ALD
Eldad Grady, Marcel Verheijen, Tahsin Faraz +3
We demonstrate the extensive study on how film density and crystallinity of molybdenum carbide () can be tailored during plasma-enhanced ALD (PEALD) by controlling either…