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most citedTantalum thin films sputtered on silicon and on different seed layers: material characterization and coplanar waveguide resonator performance

3 citations · 6 across the 6 of their papers we have counts for

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cond-mat.mtrl-sci2024★ 3 cited

Tantalum thin films sputtered on silicon and on different seed layers: material characterization and coplanar waveguide resonator performance

Moritz Singer, Benedikt Schoof, Harsh Gupta +3

Superconducting qubits are a promising platform for large-scale quantum computing. Besides the Josephson junction, most parts of a superconducting qubit are made of planar, pattern…