Effect of oxygen content on optical, structural, and dielectric properties of Al${}_x$Ta${}_y$O${}_z$$ thin films

Pavel Ondračka, Richard Drevet, Daniel Franta +3

This study reports on the optical, structural, and dielectric properties of aluminum tantalum oxide (Al${}_x$Ta${}_y$O${}_z$) thin films deposited at low temperature on silicon and steel…