13 citations · 13 across the 2 of their papers we have counts for
2 papers
physics.data-an2026
Titanic overconfidence -- dark uncertainty can sink hybrid metrology for semiconductor manufacturing
Ronald G. Dixson, Adam L. Pintar, R. Joseph. Kline +4
Hybrid metrology for semiconductor manufacturing is on a collision course with dark uncertainty. An IEEE technology roadmap for this venture has targeted a linewidth uncertainty of…
physics.app-ph2020★ 13 cited
Unmasking the resolutionthroughput tradespace of focused-ion-beam machining
Andrew C. Madison, John S. Villarrubia, Kuo-Tang Liao +6
Focused-ion-beam machining is a powerful process to fabricate complex nanostructures, often through a sacrificial mask that enables milling beyond the resolution limit of the ion b…