Study on the Effect of Annealing on Ga${}_2$O${}_3$ Thin Films Deposited on Silicon by RF Sputtering

Ana Sofia Sousa, Duarte M. Esteves, Tiago T. Robalo +3

Gallium oxide is an ultra-wide bandgap semiconductor with excellent opto-electronic properties, making it a highly promising material for a wide range of applications and devices.…