Microtubes and nanomembranes by ion-beam-induced exfoliation of $\beta$-Ga${}_2$O${}_3$

Duarte Magalhães Esteves, Ru He, Calliope Bazioti +8

This paper reports an innovative process to fabricate $\beta$-Ga${}_2$O${}_3$ microtubes and nanomembranes based on ion implantation in (100)-oriented single-crystals. We show that, un…