Realization and application of a 111 million pixel backside-illuminated detector and camera

Norbert Zacharias, Bryan Dorland, Richard Bredthauer +3

A full-wafer, 10,580 $\times$ 10,560 pixel (95 $\times$ 95 mm) CCD was designed and tested at Semiconductor Technology Associates (STA) with 9 um square pixels and 16 outputs. The…