most citedEtching of Graphene Devices with a Helium Ion Beam

294 citations · 294 across the 1 of their papers we have counts for

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cond-mat.mes-hall2009★ 294 cited

Etching of Graphene Devices with a Helium Ion Beam

M. C. Lemme, D. C. Bell, J. R. Williams +4

We report on the etching of graphene devices with a helium ion beam, including in situ electrical measurement during lithography. The etching process can be used to nanostructure a…