4 papers
SC-1 Etching of Niobium and Titanium Nitride Thin Films
Adrián Gutiérrez-Cruz, K. A. C. Rathnathilaka, Jani M. Taskinen +6
Dry etching techniques, ubiquitous in microelectronics fabrication, often result in challenging levels of undesired collateral plasma-induced damage. In this work, we demonstrate a…
Multiplexed microwave resonators by frequency comb spectroscopy
Angelo Greco, Jukka-Pekka Kaikkonen, Luca Chirolli +4
Coplanar waveguide resonators are central to the thriving field of circuit quantum electrodynamics. Recently, we have demonstrated the generation of a broadband microwave-frequency…
Native-oxide-passivated trilayer junctions for superconducting qubits
Pankaj Sethi, Om Prakash, Jukka-Pekka Kaikkonen +15
Superconducting qubits in today's quantum processing units are typically fabricated with angle-evaporated aluminum--aluminum-oxide--aluminum Josephson junctions. However, there is…
Efficient electronic cooling above 2 K by niobium-based superconducting tunnel junctions
J. Hätinen, A. Ronzani, R. P. Loreto +15
Replacing the bulky cryoliquid-based cooling stages of cryoenabled instruments by chip-scale refrigeration is envisioned to disruptively reduce the system size similar to microproc…