1 citations · 1 across the 3 of their papers we have counts for
3 papers
Experiments and Modeling of Defect Dynamics and BTI Behavior in Doped InO TFTs during C Post-Processing Forming Gas Annealing
Yu-Hsin Kuo, Chengyang Zhang, Priyankka Ravikumar +13
We investigate the impact of a monolithic three-dimensional (M3D) integration process-critical C post-processing forming gas anneal (FGA) on the electrical performance,…
Process-Technology Co-optimization for 2D-FETs
Shao-Heng Yang, Jainil Dharmil Shah, Mayukh Das +15
We present the first experimental machine learning (ML)-enabled Process-Technology Co-Optimization (PTCO) framework for optimizing 2D transition metal dichalcogenide (TMD) FET fabr…
ALD W-Doped SnO TFTs for Indium-Free BEOL Electronics
Mansi Anil Patil, Devarshi Dhoble, Shivaram Kubakaddi +4
This work reports back-end-of-line (BEOL) compatible, thin-film transistors (TFTs) with sub-10 nm tungsten-doped tin oxide (TWO) channels deposited by atomic layer deposition (ALD)…