2 papers
cond-mat.mes-hall2026
Process-Technology Co-optimization for 2D-FETs
Shao-Heng Yang, Jainil Dharmil Shah, Mayukh Das +15
We present the first experimental machine learning (ML)-enabled Process-Technology Co-Optimization (PTCO) framework for optimizing 2D transition metal dichalcogenide (TMD) FET fabr…
physics.app-ph2026
ALD W-Doped SnO TFTs for Indium-Free BEOL Electronics
Mansi Anil Patil, Devarshi Dhoble, Shivaram Kubakaddi +4
This work reports back-end-of-line (BEOL) compatible, thin-film transistors (TFTs) with sub-10 nm tungsten-doped tin oxide (TWO) channels deposited by atomic layer deposition (ALD)…