Hybrid simulation of the energy cost of O(${}^1$D) and O(${}^3$P) generation in a capacitive Ar/O${}_2$ discharge driven by sawtooth-type voltage waveforms

Jun-Xi Guo, Wan Dong, Yuan-Hong Song

Low-pressure radio-frequency capacitively coupled plasmas operated in Ar/O${}_2$ gas mixtures are widely adopted in critical semiconductor manufacturing processes. O(${}^3$P) and O($^1…