CFD Modelling and Sensitivity-Guided Design of Silicon Filament CVD Reactors

G. P. Gakis, G. Loachamín-Suntaxi, I. G. Aviziotis +6

Filament-based chemical vapor deposition (CVD) for silicon (Si) coatings is often treated as a straightforward adaptation of planar deposition, just with a cylindrical substrate. B…