2 papers
physics.acc-ph2026
Advanced Externally Seeded FEL Schemes for High-Repetition-Rate Operation at SHINE
Hanxiang Yang, Nanshun Huang, Zheng Qi +3
Externally seeded free-electron lasers (FELs) are promising approaches for generating fully coherent soft-X-ray radiation. Their extension to shorter wavelengths and MHz-level repe…
physics.acc-ph2025
Cavity-based compact light source for extreme ultraviolet lithography
Changchao He, Hanxiang Yang, Nanshun Huang +2
A critical technology for high-volume manufacturing of nanoscale integrated circuits is a high-power extreme ultraviolet (EUV) light source. Over the past decades, laser-produced p…