Coherent scattering from silicon mocrystal surface

F. Livet, G. Beutier, M. de Boissieu +4

Using coherent x-ray scattering, we evidenced atomic step roughness at the [111] vicinal surface of a silicon monocrystal of 0.05 degree miscut. Close to the (1/2 1/2 1/2) anti-Bra…