8 papers
Generative Multi-Robot Motion Planning via Diffusion Modeling with Multi-Agent Reinforcement Learning Guidance
Suk Ki Lee, Venkata Sai Deepak Mutta, Hyunwoong Ko
Coordinating multiple robots in shared environments requires generating feasible trajectories for each agent while accounting for interactions among agents. Centralized planning ap…
Graph Attention-Based Virtual Metrology for Film Deposition Processes in Semiconductor Manufacturing
Tao Han, Suk Ki Lee, Hyunwoong Ko
Artificial intelligence-driven semiconductor manufacturing increasingly operates at nanometer and angstrom scales, where precise process control depends on accurate and timely metr…
Generative Model Predictive Control in Manufacturing Processes: A Review
Suk Ki Lee, Ronnie F. P. Stone, Max Gao +3
Manufacturing processes are inherently dynamic and uncertain, with varying parameters and nonlinear behaviors, making robust control essential for maintaining quality and reliabili…
MP-GFormer: A 3D-Geometry-Aware Dynamic Graph Transformer Approach for Machining Process Planning
Fatemeh Elhambakhsh, Gaurav Ameta, Aditi Roy +1
Machining process planning (MP) is inherently complex due to structural and geometrical dependencies among part features and machining operations. A key challenge lies in capturing…
Generative Machine Learning in Adaptive Control of Dynamic Manufacturing Processes: A Review
Suk Ki Lee, Hyunwoong Ko
Dynamic manufacturing processes exhibit complex characteristics defined by time-varying parameters, nonlinear behaviors, and uncertainties. These characteristics require sophistica…
Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review
Tao Han, Zahra Taheri, Hyunwoong Ko
Semiconductor manufacturing relies heavily on film deposition processes, such as Chemical Vapor Deposition and Physical Vapor Deposition. These complex processes require precise co…