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cs.CE2026
Graph Attention-Based Virtual Metrology for Film Deposition Processes in Semiconductor Manufacturing
Tao Han, Suk Ki Lee, Hyunwoong Ko
Artificial intelligence-driven semiconductor manufacturing increasingly operates at nanometer and angstrom scales, where precise process control depends on accurate and timely metr…
cs.CE2025
Generative Multimodal Multiscale Data Fusion for Digital Twins in Aerosol Jet Electronics Printing
Fatemeh Elhambakhsh, Suk Ki Lee, Hyunwoong Ko
The rising demand for high-value electronics necessitates advanced manufacturing techniques capable of meeting stringent specifications for precise, complex, and compact devices, d…