Resonantly Driven Electron Bernstein Waves in Magnetized Low-Pressure Capacitive Discharges

Deepak Gautam, Sarveshwar Sharma, Igor Kaganovich +1

The physics of capacitively coupled plasma (CCP) discharges is investigated in a mildly magnetized regime, defined by $1\le f_{ce}/f_{rf}<2$, where $f_{ce}$ and $f_{rf}$ denote…