most citedPost-field ionization of Si clusters in atom probe tomography: A joint theoretical and experimental study

7 citations · 7 across the 2 of their papers we have counts for

collaborators
Showing physics.app-phShow all

1 paper · 1 filter

physics.app-ph2025

Multi-Length-Scale Dopants Analysis of an Image Sensor via Focused Ion Beam-Secondary Ion Mass Spectrometry and Atom Probe Tomography

Bavley Guerguis, Ramya Cuduvally, Alexander Ost +7

The following article presents a multi-length-scale characterization approach for investigating doping chemistry and spatial distributions within semiconductors, as demonstrated us…