Electrical and Structural Properties of In-Situ MOCVD Grown Al${}_2$O${}_3$/$\beta$-Ga${}_2$O${}_3$ and Al${}_2$O${}_3$/$\beta$-(Al${}_x$Ga${}_{1-x}$)${}_2$O${}_3$ MOSCAPs

A F M Anhar Uddin Bhuiyan, Lingyu Meng, Dong Su Yu +6

This study investigates the electrical and structural properties of MOSCAPs with in-situ MOCVD-grown Al${}_2$O${}_3$ dielectrics on (010) $\beta$-Ga${}_2$O${}_3$ and $\beta$-(Al${}_x$Ga${}_{1-x}$)${}_2$…