most citedDynamically Tunable Membrane Metasurfaces for Infrared Spectroscopy

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cond-mat.mtrl-sci2025

Tuning the surface energy of fluorinated diamond-like carbon coatings via plasma immersion ion implantation plasma-enhanced chemical vapor deposition with 1,1,1,2-tetrafluoroethane

Yuhan Tong, Maryam Zahedian, Aiping Zeng +6

We demonstrate an environmentally friendly and scalable method to create fluorine-doped diamond-like carbon (F-DLC) coatings using plasma immersion ion implantation plasma-enhanced…