most citedEffect of substrate temperature on the deposition of Al-doped ZnO thin films using high power impulse magnetron sputtering

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cond-mat.mtrl-sci2025★ 36 cited

Effect of substrate temperature on the deposition of Al-doped ZnO thin films using high power impulse magnetron sputtering

Martin Mickan, Ulf Helmersson, David Horwat

Al-doped ZnO thin films were deposited using reactive high power impulse magnetron sputtering at substrate temperatures between room temperature and 600 C. Two sample ser…