2 papers
eess.SY2025
Vibration Analysis and Mitigation in Semiconductor Motion Stages Using DMAIC Methodology- A Case Study
Yin Li, Hua Chen, Fugee Tsung
Motion stages are critical in semiconductor manufacturing equipment for processes like die bonding, wafer loading, and chip packaging, as their performance must meet the industry's…
cs.AI2024
MCCoder: Streamlining Motion Control with LLM-Assisted Code Generation and Rigorous Verification
Yin Li, Liangwei Wang, Shiyuan Piao +4
Large Language Models (LLMs) have demonstrated significant potential in code generation. However, in the factory automation sector, particularly motion control, manual programming,…