Confocal Subsurface Backscattering Microscopy for Optical Identification of Nanoscale Threading Dislocations in SiC Substrates

Russel Cruz Sevilla, Hsiu-Ming Hsu, Irwan Saleh Kurniawan +8

High density threading dislocations in SiC wafers facilitate reverse leakage and degradation, yet commercial defect inspection systems based on surface profiling and PL dark-contra…