2 papers
physics.optics2026
Confocal Subsurface Backscattering Microscopy for Optical Identification of Nanoscale Threading Dislocations in SiC Substrates
Russel Cruz Sevilla, Hsiu-Ming Hsu, Irwan Saleh Kurniawan +8
High density threading dislocations in SiC wafers facilitate reverse leakage and degradation, yet commercial defect inspection systems based on surface profiling and PL dark-contra…
physics.optics2026
Unraveling the Defect Physics of SiC Micropipe Sidewalls by Non-Line-of-Sight Confocal Spectromicroscopy: Amphoteric Giant Traps
Irwan Saleh Kurniawan, Russel Cruz Sevilla, Ruth Jeane Soebroto +6
Micropipes are among the most detrimental defects in SiC wafer and are closely linked to catastrophic device failure. However, the microscopic defect nature of their internal sidew…