most citedLaboratory-Based Correlative Soft X-ray and Fluorescence Microscopy in an Integrated Setup

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cond-mat.mtrl-sci2023

Non-destructive depth reconstruction of Al-AlCu layer structure with nanometer resolution using extreme ultraviolet coherence tomography

Johann Jakob Abel, Jonathan Apell, Felix Wiesner +8

Non-destructive cross-sectional characterization of materials systems with a resolution in the nanometer range and the ability to allow for time-resolved in-situ studies is of grea…