31 citations · 69 across the 5 of their papers we have counts for
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cond-mat.mtrl-sci2023★ 19 cited
Combinatorial Reactive Sputtering with Auger Parameter Analysis Enables Synthesis of Wurtzite Zn2TaN3
Siarhei Zhuk, Alexander Wieczorek, Amit Sharma +4
The discovery of new functional materials is one of the key challenges in materials science. Combinatorial high-throughput approaches using reactive sputtering are commonly employe…
cond-mat.mtrl-sci2023
Improving the crystallinity and texture of oblique-angle-deposited AlN thin films using reactive synchronized HiPIMS
Jyotish Patidar, Amit Sharma, Siarhei Zhuk +7
Many technologies require highly-oriented and textured functional thin films. The most common synthe-sis approaches use on-axis sputter geometries. However, in some scenarios, on-a…