Resolving the Blueshift in Calculations of the EUV Spectrum of Multiply Charged Tin Ions

M. L. Reitsma, J. Sheil, O. O. Versolato +2

We report ab initio relativistic calculations on the complex open shell Sn${}^{12+}$ highly charged ion, a prototypical plasma ion relevant for extreme ultraviolet (EUV) nanolithogra…