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most citedLow-loss Nb on Si superconducting resonators from a dual-use spintronics deposition chamber and with acid-free post-processing

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cond-mat.mtrl-sci2024

Impact of etches on thin-film single-crystal niobium resonators

H. Wang, T. Banerjee, T. G. Farinha +4

A single crystal niobium thin film was grown using molecular beam epitaxy on a c-plane sapphire wafer. Several samples were fabricated into dc resistivity test devices and coplanar…