Investigation of O interstitial diffusion in $\beta$-Ga${}_2$O${}_3$: direct approach via master diffusion equations

Grace McKnight, Channyung Lee, Elif Ertekin

Monoclinic $\beta$-Ga${}_2$O${}_3$, a promising wide band gap semiconducting material, exhibits complex, anisotropic diffusional characteristics and mass transport behavior as a results of…