Ferroelectric Al${}_{1-x}$B${}_x$N sputtered thin films on n-type Si bottom electrodes

Ian Mercer, Chloe Skidmore, Sebastian Calderon +2

Ferroelectric Al${}_{1-x}$B${}_x$N thin films are grown on highly doped and plasma treated (100) n-type Si. We demonstrate ferroelectricity for x = <0.01, 0.02, 0.06, 0.08, 0.13, and 0…