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Liuye Mo

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ORCID 0000-0001-9811-9517

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1 paper

cond-mat.mtrl-sci2004

Surface Passivation of GaAs using Chemical and Plasma Methods

D. Alexiev, D. A. Prokopovich, L. Mo

Passivation of the GaAs surface was attempted using aqueous P2S5-NH4OH,(NH4)2Sx and plasma nitrogenataion and hydrogenation. Results indicate that plasma nitrogenation with pretrea…

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