3 citations · 3 across the 2 of their papers we have counts for
2 papers
physics.optics2025
Positive-tone Nanolithography of Antimony Trisulfide with Femtosecond Laser Wet-etching
Abhrodeep Dey, Uwe Hübner, Albane Benardais +10
Antimony trisulfide (), as an emerging material for integrated photonic devices, has attracted significant attention due to its high index, low loss, and phase-changin…
physics.optics2024★ 3 cited
Grayscale Electron Beam Lithography Direct Patterned Antimony Sulfide
Wei Wang, Uwe Hübner, Tao Chen +13
The rise of micro/nanooptics and lab-on-chip devices demands the fabrication of three-dimensional structures with decent resolution. Here, we demonstrate the combination of graysca…